Micromachined 3/2-port pressure controlling valve

Quenzer, Hans-Joachim; Günther, Götz Friedrich; Wagner, B.

Bremen : Messe Bremen GmbH (2000)
Contribution to a book, Contribution to a conference proceedings

In: Actuator 2000 : conference proceedings / 7th International Conference on New Actuators & Interational Exhibition on Smart Actuators and Drive Systems, 19 - 21 June 2000, Bremen, Germany / [ed.: Hubert Borgmann]
Page(s)/Article-Nr.: 220-223