Development of a thermally actuated pneumatic 3/2-way-microvalve

Günther, Götz Friedrich; Quenzer, Hans-Joachim

Berlin [u.a.] : VDE-Verl. (2000)
Contribution to a book, Contribution to a conference proceedings

In: MICRO.tec 2000 : applications - trends - visions ; proceedings / VDE World Microtechnologies Congress, September 25 - 27, 2000, Expo 2000, Hannover, Germany. Organized by VDE Association for Electrical, Electronic & Information Technologies. Sponsored by EUREL .... - MICRO.tec 2000 [1] / Vol. 1. Mit CD-ROM
Page(s)/Article-Nr.: 585-589

Institutions

• Chair and Institute for Fluid Power Drives and Systems [412810]