Application of a silicon microvalve to pilot-operation of pneumatic valves

G√ľnther, G.

Singapore [u.a.] : Springer (1999)
Contribution to a conference proceedings

In: Recent Advances in Mechatronics : [a selected set of papers prepared for presentation during the 2. International Conference on Recent Advances in Mechatronics, 24.-26.5.1999, in Istanbul, Turkey] / Okyay Kaynak ... [Organized by UNESCO Chair on Mechatronics ... Co-sponsored by IEEE Industrial Electronics Society...] ICRAM '99 / Kaynak, O. [u.a.] Hrsg

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