Surface micromachined metallic microactuator with buckling characteristic

Pott, Harald; Quenzer, Hans-Joachim; Massioseck, A.; Wagner, B.

(1995)
Contribution to a book

In: Digest of technical papers. Stockholm 1995. - Bd. 2
Page(s)/Article-Nr.: 128-133

Institutions

• Chair and Institute for Fluid Power Drives and Systems [412810]